Raaijmakers, Ivo J.M.M.: search on Z-Library

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1

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Spectral ellipsometry on patterned wafers

Mills, Duncan W., Allen, Ronald L., Duncan, Walter M., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 601 KB

english, 1995

2

Al planarization processes for multilayer metallization of quarter micrometer devices

Zheng Xu, Hoa Kieu, Ivo J. Raaijmakers, Avi Tepman

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 750 KB

english, 1994

3

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Relationships between process fundamentals, facility design, and production control of semiconductor manufacturing systems

Chen, Shannon, Hase, Rieko C., Mordaunt, Kaine, Uzsoy, Reha M., Takoudis, Christos G., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 465 KB

english, 1995

4

Low temperature metal-organic chemical vapor deposition of advanced barrier layers for the microelectronics industry

Ivo J. Raaijmakers

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 1.08 MB

english, 1994

5

MOCVD-TiN Barrier Layers for ULSI Applications

Raaijmakers, Ivo J., Vrtis, Raymond N., Yang, Jack, Ramaswami, Seshadri, Lagendijk, Andre, Roberts, David A., Broadbent, Eliot K.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 3.02 MB

english, 1992

6

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Control of CVD precursor purity for integrated circuit manufacture

Roberts, David A., Graf, Hans J., Halberstadt, Michael J., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 303 KB

english, 1995

7

Vlsi Metallization by Coherent Magnetron Sputtering

Guo, Xin S., Van Gogh, Jim, Raaijmakers, Ivo

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 857 KB

english, 1994

8

A comparison of the reaction of titanium with amorphous and monocrystalline silicon

Raaijmakers, Ivo J. M. M., Kim, Ki-Bum

Journal:

Journal of Applied Physics

Year:

1990

Language:

english

File:

PDF, 1.65 MB

english, 1990

9

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - SCA and SPV in line monitoring

Barla, Kathy, Levy, D., Fleury, A., Reynard, J. P., Kwakman, L., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 203 KB

english, 1995

10

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - In-situ wafer curvature measurements during rapid thermal annealing of Si(100) wafers

Jongste, J. Hans F., Oosterlaken, Tom, Bart, G. C., Janssen, Guido C., Radelaar, Sybrand, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 262 KB

english, 1995

11

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Development of cost of ownership modeling at a semiconductor production facility

Nanez, Jr., Raul, Iturralde, Armando, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 235 KB

english, 1995

12

The effect of density and microstructure on the performance of TiN barrier films in Cu metallization

Park, Ki-Chul, Kim, Ki-Bum, Raaijmakers, Ivo J. M. M., Ngan, Ken

Journal:

Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 1.12 MB

english, 1996

13

Nucleation Phenomena during Titanium Silicon Reaction

Raaijmakers, Ivo J.M.M., Ijzendoorn, Leo J. van, Theunissen, Anton M.L., Kim, Ki-Bum

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 1.02 MB

english, 1989

14

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Applications of laser scanning systems to deposited dielectrics

Larson, C. Thomas, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 370 KB

english, 1995

15

Reactively sputtered TiN as a diffusion barrier between Cu and Si

Wang, Shi-Qing, Raaijmakers, Ivo, Burrow, Brad J., Suthar, Sailesh, Redkar, Shailesh, Kim, Ki-Bum

Journal:

Journal of Applied Physics

Year:

1990

Language:

english

File:

PDF, 1.78 MB

english, 1990

16

Microstructure and barrier properties of reactively sputtered Ti-W nitride

Ivo J. Raaijmakers, Tarshish Setalvad, Ameet S. Bhansali, Brad J. Burrow, Laszlo Gutai, KI-Bum Kim

Journal:

Journal of Electronic Materials

Year:

1990

Language:

english

File:

PDF, 1.31 MB

english, 1990

17

Coherent TiN Diffusion Barriers for Sub-0.5 μm Planarized AL Technology

Ngan, Ken, Mosely, Rod, Xu, Zheng, Raaijmakers, Ivo

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 1.19 MB

english, 1994

18

Parameters Affecting the Process Window for Laser Planarization of Aluminum.

Raaijmakers, Ivo J, Chu, Harren, Ong, Edith, Wang, Shi-Qing, Ritz, Ken

Journal:

MRS Proceedings

Year:

1990

Language:

english

File:

PDF, 1.47 MB

english, 1990

19

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Elimination of monitor wafers in metal film process control

Johnson, Sr., Walter H., Hobbs, Dan, Jones, Ron, Pors, Gary, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 153 KB

english, 1995

20

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Digital tester-based measurement methodology for process control in multilevel metallization systems

Hess, Christopher, Weiland, Larg H., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 471 KB

english, 1995

21

Energy distribution of negative O− and OH− ions emitted from YBaCuO and iron garnet targets by dc and rf magnetron sputtering

Krumme, Jens-Peter, Hack, Ron A. A., Raaijmakers, Ivo J. M. M.

Journal:

Journal of Applied Physics

Year:

1991

Language:

english

File:

PDF, 1.86 MB

english, 1991

22

Crystallization of amorphous Ti-Si alloy thin films: Microstructure and resistivity

Raaijmakers, Ivo J. M. M., van Ommen, Alfred H., Reader, Alec H.

Journal:

Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 1.26 MB

english, 1989

23

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Contamination control for ultrapure chemicals from microelectronics fab

Ulieru, Dumitru G., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 471 KB

english, 1995

24

Low temperature MOCVD of advanced barrier layers for the microelectronics industry

Ivo J. Raaijmakers, Jack Yang

Journal:

Applied Surface Science

Year:

1993

Language:

english

File:

PDF, 1.02 MB

english, 1993

25

Additive Value of Semiautomated Quantification of Coronary Artery Disease Using Cardiac Computed Tomographic Angiography to Predict Future Acute Coronary Syndrome

Versteylen, Mathijs O., Kietselaer, Bas L., Dagnelie, Pieter C., Joosen, Ivo A., Dedic, Admir, Raaijmakers, Rolf H., Wildberger, Joachim E., Nieman, Koen, Crijns, Harry J., Niessen, Wiro J., Daemen, M

Journal:

Journal of the American College of Cardiology

Year:

2013

Language:

english

File:

PDF, 918 KB

english, 2013

26

A Solid State Amorphisation Reaction in Ti-Si Diffusion Couples: The Phase Field

Raaijmakers, Ivo J. M. M., Oosting, Piet H., Reader, Alec H.

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 753 KB

english, 1987

27

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - In-situ process monitoring in metal deposition processes

Kobayashi, Shigeru, Nishitani, Eisuke, Shimamura, Hideaki, Yajima, Akira, Kishimoto, Satoshi, Yoneoka, Yuji, Uchida, Hiroyuki, Morioka, Natsuyo, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 489 KB

english, 1995

28

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Multiresolution pattern detector networks for controlling plasma etch reactors

Allen, Ronald L., Moore, Randy, Whelan, Mike, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 340 KB

english, 1995

29

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - On-line exhaust gas analytics during plasma cleaning of PECVD facilities

Guber, Andreas E., Koehler, Uwe, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 345 KB

english, 1995

30

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Method of multilayer semiconductor structures cross section preparation for transmission electron microscopy

Karasyov, Vladimir Y., Skornyakov, Alexander V., Kuznetsov, Mikhail G., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 351 KB

english, 1995

31

Residual Gas Phase Contamination of Al-Cu Alloy Films and its Effect on Electromigration Behavior

Hashim, Imran, Raaijmakers, Ivo J., Adler, Glen, Sidhwa, Ardy, Chopra, Sudhir

Journal:

MRS Proceedings

Year:

1996

Language:

english

File:

PDF, 1.50 MB

english, 1996

32

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Resistor, silicon dioxide, and nitrite films ion etching process: in-situ monitoring using photoemission testing

Kunitzin, A., Dekhtyar, Yuri, Noskov, Vladimir, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 129 KB

english, 1995

33

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - (Invited) Current and Future Applications of ALD in Micro-Electronics

Raaijmakers, Ivo J.

Year:

2011

Language:

english

File:

PDF, 28.33 MB

english, 2011

34

First Phase Nucleation And Growth Of Titanium Disilicide With An iPhasis On The Influence Of Oxygen

Van Houtum, Harrie J. W., Raaijmakers, Ivo J. M. M.

Journal:

MRS Proceedings

Year:

1985

Language:

english

File:

PDF, 337 KB

english, 1985

35

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Evaluation of ULPA/prefilter media for the reduction of airborne boron contamination

Squatrito, John, Nanez, Jr., Raul, Keeton, Dewey, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 274 KB

english, 1995

36

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Effect of sputtering target crystallographic orientation on step coverage and collimation efficiency

Bailey, Robert S., Hill, Nicholas C., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 448 KB

english, 1995

37

The formation of an amorphous silicide by thermal reaction of sputter-deposited Ti and Si layers

Raaijmakers, Ivo J. M. M., Reader, Alec H., Oosting, Piet H.

Journal:

Journal of Applied Physics

Year:

1988

Language:

english

File:

PDF, 1017 KB

english, 1988

38

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Neural manufacturing: a novel concept for processing modeling, monitoring, and control

Fu, Chi Y., Petrich, Loren, Law, Benjamin, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 348 KB

english, 1995

39

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Sensing technologies for semiconductor process applications

Iturralde, Armando, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 342 KB

english, 1995

40

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - System integration for laser restructuring

Moreno, Wilfrido A., Saini, Nitin, Acon, Otto, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 217 KB

english, 1995

41

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Manufacturing challenges for sub-half-micron technologies

Liou, Fu-Tai, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 484 KB

english, 1995

42

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Self-learning intellectual system of expert diagnostics of technological malfunctions in ULSI manufacturing

Arutyunov, Peter A., Kuznetsov, Mikhail G., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 1.21 MB

english, 1995

43

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Materials delivery challenges in ULSI processing

Loan, James F., Sullivan, Laura A., Sullivan, John J., Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 1.06 MB

english, 1995

44

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Planar multilevel metallization technologies for ULSI devices

Xu, Zheng, Ngan, Ken, VanGogh, Jim, Mosely, Rod, Tanaka, Yoichiro, Kieu, H., Chen, Fusen E., Raaijmakers, Ivo J., Chen, Fusen E., Murarka, Shyam P.

Year:

1994

Language:

english

File:

PDF, 763 KB

english, 1994

45

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing - Automation in semiconductor production minienvironments, flexibility and information flow

Dudde, Ralf, Staudt-Fischbach, Peter, Herzog, Olaf, Sabnis, Anant G., Raaijmakers, Ivo J.

Year:

1995

Language:

english

File:

PDF, 565 KB

english, 1995

46

Transmission Electron Microscopy of Mocvd Titanium Nitride Films

Itoh, Toshio, Konno, Toyohiko J., Sinclair, Robert, Raaijmakers, Ivo J.M.M., Roberts, Bruce E.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 2.30 MB

english, 1994

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